Li Simon, Fu Yue. 3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics

Springer, 2012. — 300 p. — ISBN: 978-1-4614-0481-1.Technology computer-aided design, or TCAD, is critical to today’s semiconductor technology and anybody working in this industry needs to know something about TCAD. This book is about how to use computer software to manufacture and test virtually semiconductor devices in 3D. It brings to life the topic of semiconductor device physics, with a hands-on, tutorial approach that de-emphasizes abstract physics and equations and emphasizes real practice and extensive illustrations. Coverage includes a comprehensive library of devices, representing the state of the art technology, such as SuperJunction LDMOS, GaN LED devices, etc.Semiconductor Industry and TCAD
Advanced Theory of TCAD Process Simulation
Advanced Theory of TCAD Device Simulation
Setting Up a 3D TCAD Simulation
P-N Junction Diode
MOSFET/CMOS Technology
Smart Power Technology and Power Semiconductor Devices
3D Interconnect Simulation
CMOS Image Sensor
Hybrid Silicon Laser