Papadopoulos C. Nanofabrication: Principles and Applications

SpringerBriefs in Materials, 2016. – 84 p. – ISBN: 3319317407This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.Silicon Planar Processing and Photolithography
Direct-Write Lithography Approaches
Stamping Methods
Scanning-Probe Methods
Natural Lithography
Direct-Growth and Self-assembly
Practical Examples and Case Studies of Nanofabrication